Surface microstructuring of silica glass by laser-induced backside wet etching with a DPSS UV laser

✍ Scribed by Hiroyuki Niino; Yoshizo Kawaguchi; Tadatake Sato; Aiko Narazaki; Ryozo Kurosaki

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 436 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.02.099