Microstructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses

✍ Scribed by M. Ehrhardt; G. Raciukaitis; P. Gecys; K. Zimmer

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 447 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2010.05.055