Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules

✍ Scribed by X. Ding; Y. Yasui; Y. Kawaguchi; H. Niino; A. Yabe

• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 198 KB
• Volume: 75
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390101131