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Effects of ALD HfO2 thickness on charge trapping and mobility

โœ Scribed by J.H. Sim; S.C. Song; P.D. Kirsch; C.D. Young; R. Choi; D.L. Kwong; B.H. Lee; G. Bersuker


Book ID
108207477
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
349 KB
Volume
80
Category
Article
ISSN
0167-9317

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