When a Ta layer is deposited at the Si-Ti interface a new phase has been detected, i.e., the TiSi C40. The 2 C40-C54 transformation kinetics and the film morphology are consistent with an increase of the nucleation density with respect to the C49-C54 transition. The activation energies for the nucle
β¦ LIBER β¦
Effects of a titanium interlayer on the formation of platinum silicides
β Scribed by Chong-Kuang Lee; Chia-Dar Hsieh; Bae-Heng Tseng
- Book ID
- 108389091
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 540 KB
- Volume
- 303
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
Effects of a Ta interlayer on the titani
β
F La Via; S Privitera; F Mammoliti; M.G Grimaldi
π
Article
π
2002
π
Elsevier Science
π
English
β 353 KB
Laser-induced formation of titanium sili
β
Chen, S. Y.; Shen, Z. X.; Chen, Z. D.; See, A. K.; Chan, L. H.; Zhang, T. J.; Te
π
Article
π
1999
π
John Wiley and Sons
π
English
β 194 KB
π 1 views
In this article, we report on the laser-induced formation of both C49 and C54 TiSi 2 films with fine grains using Q-switched Nd : YAG laser irradiation from Ti/Si samples. The films formed were characterized with micro-Raman spectroscopy, high-resolution transmission electron microscopy, energy-disp
Influence of argon implantation on the f
β
Borisenko, V. E. ;Zarovskii, D. I. ;Tokarev, V. V.
π
Article
π
1988
π
John Wiley and Sons
π
English
β 138 KB
Formation of titanium silicides by mecha
β
A. Calka; A. P. Radlinski; R. A. Shanks; A. P. Pogany
π
Article
π
1991
π
Springer
π
English
β 322 KB
Effect of stress on silicide formation k
β
Rajan V Nagabushnam; Rajiv K Singh; Sujit Sharan
π
Article
π
1998
π
Elsevier Science
π
English
β 383 KB
Effect of erbium interlayer on nickel si
β
W. Huang; Y.L. Min; G.P. Ru; Y.L. Jiang; X.P. Qu; B.Z. Li
π
Article
π
2008
π
Elsevier Science
π
English
β 479 KB