Effectiveness of Nitridation of Hafnium Silicate Dielectrics: A Comparison Between Thermal and Plasma Nitridation

✍ Scribed by O'Sullivan, B.J.; Kaushik, V.S.; Everaert, J.-L.; Trojman, L.; Ragnarsson, L.-A.; Pantisano, L.; Rohr, E.; DeGendt, S.; Heyns, M.

• Book ID: 114618780
• Publisher: IEEE
• Year: 2007
• Tongue: English
• Weight: 212 KB
• Volume: 54
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2007.898460