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Effect of thermal annealing and hydrogen-plasma treatment in boron-doped microcrystalline silicon

✍ Scribed by Y. Sobajima; S. Kamanaru; H. Muto; J. Chantana; C. Sada; A. Matsuda; H. Okamoto

Book ID: 119301048
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 559 KB
Volume: 358
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2011.12.010

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