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Effect of the Surface Bond States in as-Deposited DLC Films on the Incorporation of Nitrogen and Oxygen Atoms

✍ Scribed by Nitta, Yuki; Okamoto, Keishi; Nakatani, Tatsuyuki; Shinohara, Masanori

Book ID: 118060509
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 313 KB
Volume: 40
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2012.2203613

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