The chemical bonding state of nitrogen in kapton-derived carbon film and its effect on the graphitization process

✍ Scribed by Michio Inagaki; Hiroto Tachikawa; Tamaki Nakahashi; Hidetaka Konno; Yoshihiro Hishiyama

• Book ID: 104107230
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 502 KB
• Volume: 36
• Category: Article
• ISSN: 0008-6223
• DOI: 10.1016/s0008-6223(97)00236-4

✦ Synopsis

The chemical bonding state of the nitrogen which remains in the carbon films derived from a polyimide Kapton film was studied by X-ray photoelectron spectroscope and related to the changes in structure and transport properties. The nitrogen remaining after heat treatment up to 2200°C was in a tertiary bonding state, replacing carbon atoms in hexagonal layers, which was supported by theoretical calculation based on ab-initio molecular orbital theory. The departure of substituted nitrogen atoms from hexagonal layers showed a good correspondence with structure development and changes in transport properties, the presence of nitrogen depressing the developments in structure and transport properties. After the departure of nitrogen above 2300°C graphitization of the films was very remarkable.