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The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD

โœ Scribed by Nelson, N.; Rakowski, R.T.; Franks, J.; Woolliams, P.; Weaver, P.; Jones, B.J.


Book ID
124120878
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
735 KB
Volume
254
Category
Article
ISSN
0257-8972

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