The effect of the substrate bias on the Raman spectra and thermal stability of diamond-like carbon (DLC) and silicon-modified DLC films prepared by plasma-enhanced chemical vapour deposition (PECVD)

✍ Scribed by Ogwu, A A; Lamberton, R W; Maguire, P D; McLaughlin, J A

• Book ID: 125519820
• Publisher: Institute of Physics
• Year: 1999
• Tongue: English
• Weight: 223 KB
• Volume: 32
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/32/9/306