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Effect of substrate bias on the bonding structure of carbon nitride thin films

✍ Scribed by A.K.M.S. Chowdhury; D.C. Cameron; M.A. Monclus


Book ID
114086856
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
158 KB
Volume
355-356
Category
Article
ISSN
0040-6090

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