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Chemical bonding, structure, and hardness of carbon nitride thin films

✍ Scribed by Zheng, W.T.; Yu, W.X.; Li, H.B.; Wang, Y.M.; Cao, P.J.; Jin, Z.S.; Broitman, E.; Sundgren, J.-E.

Book ID
118264296
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
192 KB
Volume
9
Category
Article
ISSN
0925-9635

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## Ε½ . Amorphous carbon nitride a-C:N films were deposited by reactive direct current magnetron sputtering of graphite using Ε½ . a gaseous mixture of Ar and N . X-ray photo electron spectroscopy analysis XPS showed that there is an optimum volume 2 ratio of nitrogen:argon in the sputter gas that r