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Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy

โœ Scribed by Liu, Fan-Xin; Yao, Kai-Lun; Liu, Zu-Li

Book ID
121367824
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
669 KB
Volume
16
Category
Article
ISSN
0925-9635

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Amorphous carbon containing very little hydrogen and having a highly tetrahedral structure has been prepared by the Filtered Cathodic Vacuum Arc (FCVA) technique under different deposition temperatures. Based on Raman measurement, it was found that the I D =I G intensity ratio, the G band peak posit