Investigation of tetrahedral amorphous carbon films using x-ray photoelectron and Raman spectroscopy

✍ Scribed by Tay, B. K.; Shi, X.; Tan, H. S.; Chua, Daniel H. C.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 142 KB
• Volume: 28
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(199908)28:1<231::aid-sia583>3.0.co;2-3

✦ Synopsis

Amorphous carbon containing very little hydrogen and having a highly tetrahedral structure has been prepared by the Filtered Cathodic Vacuum Arc (FCVA) technique under different deposition temperatures. Based on Raman measurement, it was found that the I D =I G intensity ratio, the G band peak position and the linewidth change with deposition temperature. From XPS measurement, it was demonstrated that four Gaussians components were required to have a good fit of the C 1s spectra of amorphous carbon film from which the relative concentration of sp 3 =sp 2 hybrids can be determined easily. These observations, together with the carbon network structure deduced from the Raman spectra, demonstrate that deposition temperature is an important factor in determining film properties such as sp 3 content. Specifically, it was observed that the sp 3 content derived from the Raman spectra parameter (I D =I G ratio) correlates well with that deduced from the XPS measurement data.