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Effect of RuO2 electrode on laser-MBE prepared HfO2 gate dielectrics

✍ Scribed by Y.K. Lu; W. Zhu; X.F. Chen; R. Gopalkrishnan


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
125 KB
Volume
83
Category
Article
ISSN
0167-9317

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Abstrae-The polymenzahon of amhne was electrochemlcally performed on RuO, and Pt electrodes in 0 5 M H,SO, usmg cyclic voltammetry The results showed that the rate of amlme polymenzatlon was strongly dependent upon the upper an&c potentml lmuts of cychc voltammetry as well as upon the type of anod~c