In-situ MBE Si as passivating interlayer on GaAs for HfO2 MOSCAP’s: effect of GaAs surface reconstruction

✍ Scribed by D.J. Webb; J. Fompeyrine; S. Nakagawa; A. Dimoulas; C. Rossel; M. Sousa; R. Germann; S.F. Alvarado; J.P. Locquet; C. Marchiori; H. Siegwart; A. Callegari; E. Kiewra; Y. Sun; J. De Souza; N. Hoffmann

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 423 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.04.056