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Effect of Post-Treatments on Atomic Layer Deposition of TiN Thin Films Using Tetrakis(dimethylamido)titanium and Ammonia

✍ Scribed by Yun, Jong-Ho; Choi, Eun-Seok; Jang, Choel-Min; Lee, Choon-Soo

Book ID: 126192818
Publisher: Institute of Pure and Applied Physics
Year: 2002
Tongue: English
Weight: 154 KB
Volume: 41
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.41.L418

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