Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO2 using tetrakis(dimethylamido)titanium and water

✍ Scribed by Sperling, Brent A.; Hoang, John; Kimes, William A.; Maslar, James E.; Steffens, Kristen L.; Nguyen, Nhan V.

• Book ID: 121783540
• Publisher: AVS (American Vacuum Society)
• Year: 2014
• Tongue: English
• Weight: 949 KB
• Volume: 32
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.4872166