Infrared study on room-temperature atomic layer deposition of TiO2 using tetrakis(dimethylamino)titanium and remote-plasma-excited water vapor

✍ Scribed by Kanomata, K.; Pansila, P.; Ahmmad, B.; Kubota, S.; Hirahara, K.; Hirose, F.

• Book ID: 122230816
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 655 KB
• Volume: 308
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2014.04.166