Reflection absorption infrared spectroscopy during atomic layer deposition of HfO2 films from tetrakis(ethylmethylamido)hafnium and water

✍ Scribed by Brent A. Sperling; William A. Kimes; James E. Maslar

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 357 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2010.03.050