✦ LIBER ✦
Atomic Layer Deposition of Titanium Nitride Thin Films Using tert-Butylamine and Allylamine as Reductive Nitrogen Sources
✍ Scribed by Juppo, Marika; Alén, Petra; Ritala, Mikko; Sajavaara, Timo; Keinonen, Juhani; Leskelä, Markku
- Book ID
- 121363520
- Publisher
- The Electrochemical Society
- Year
- 2002
- Tongue
- English
- Weight
- 61 KB
- Volume
- 5
- Category
- Article
- ISSN
- 1099-0062
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