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Effect of plasma treatments on ultra low-k material properties

✍ Scribed by A. Humbert; L. Mage; C. Goldberg; K. Junker; L. Proenca; J.B. Lhuillier

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 210 KB
Volume: 82
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.07.022

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