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Effect of porogen residue on electrical characteristics of ultra low-k materials

✍ Scribed by Mikhail R. Baklanov; Larry Zhao; Els Van Besien; Marianna Pantouvaki

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 477 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.12.077

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