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Mechanical properties of a plasma-modified porous low-k material

✍ Scribed by L. Broussous; G. Berthout; D. Rébiscoul; V. Rouessac; A. Ayral

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
350 KB
Volume
87
Category
Article
ISSN
0167-9317

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