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Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials

โœ Scribed by Zijian Li; Mark C. Johnson; Minwei Sun; E. Todd Ryan; David J. Earl; Wolfgang Maichen; Jeremy I. Martin; Shuang Li; Christopher M. Lew; Junlan Wang; Michael W. Deem; Mark E. Davis; Yushan Yan


Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
316 KB
Volume
45
Category
Article
ISSN
0044-8249

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## Abstract The synthesis of organicโ€functionalized pureโ€silicaโ€zeolites (PSZs) with MFIโ€ and MELโ€type structures for lowโ€__k__ applications prepared through a directโ€synthesis method by adding a fluorinated silane to the synthesis solution is reported. The added fluorine functionality increases th