Evidence of Large Voids in Pure-Silica-Zeolite Low-k Dielectrics Synthesized by Spin-on of Nanoparticle Suspensions

✍ Scribed by Salvador Eslava; Mikhail R. Baklanov; Alexander V. Neimark; Francesca Iacopi; Christine E. A. Kirschhock; Karen Maex; Johan A. Martens

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 425 KB
• Volume: 20
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200701798