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Effects of Crystallinity in Spin-On Pure-Silica-Zeolite MFI Low-Dielectric-Constant Films

✍ Scribed by Z. J. Li; S. Li; H. M. Luo; Y. S. Yan

Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 232 KB
Volume: 14
Category: Article
ISSN: 1616-301X
DOI: 10.1002/adfm.200305147

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