✦ LIBER ✦

Effect of oxygen flow rate on the properties of SiOx films deposited by reactive magnetron sputtering

✍ Scribed by Fachun Lai; Ming Li; Haiqian Wang; Yousong Jiang; Yizhou Song

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of composite SiOx/polym

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Influence of oxygen flow rate on photoca

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Nitrogen effect on the electrical proper

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Physical properties of zirconium oxynitr

✍ Laurikaitis, M; Burinskas, S; Dudonis, J; Milčius, D 📂 Article 📅 2008 🏛 Institute of Physics 🌐 English ⚖ 605 KB

Effects of oxygen partial pressure on op

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Effect of substrate temperature on the p

✍ Cho, Shinho 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 608 KB