𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Characterization of composite SiOx/polymer films deposited on pet substrates by RF reactive magnetron sputtering

✍ Scribed by Liu, Zhuang; Ma, Xinxin; Yang, ChunLi; Xu, Fangjun

Book ID
121507555
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
494 KB
Volume
89
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Effects of nitrogen partial pressure on
Effects of nitrogen partial pressure on titanium oxynitride films deposited by reactive RF magnetron sputtering onto PET substrates
✍ M.C. Lin; L.-S. Chang; H.C. Lin πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 818 KB

Titanium oxynitride (TiN x O y ) films have been deposited onto polyethylene terephthalate (PET) substrates by reactive radio frequency (RF) magnetron sputtering. The influence of the nitrogen (N 2 ) partial pressure in the discharge atmosphere, with a set pressure of 0.133 Pa, was examined. Other d

Structural evolution of ZnO films deposi
Structural evolution of ZnO films deposited by rf magnetron sputtering on glass substrate
✍ Liao, Yan-Ping ;Zhang, Jian-Hua ;Li, Shu-Xin ;Guo, Zhan-Sheng ;Cao, Jin ;Zhu, We πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 520 KB

## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec