The NiO x thin films were deposited by reactive dc-magnetron sputtering from a nickel metal target in Ar + O 2 with the relative O 2 content 5%. The as-deposited NiO x thin films could represent a two-component system comprising crystalline NiO particles dispersed in an amorphous Ni 2 O 3 . Decompos
โฆ LIBER โฆ
Effects of oxygen partial pressure on optical properties of NiOx films deposited by reactive DC-magnetron sputtering
โ Scribed by Ying Zhou; Yongyou Geng; Donghong Gu
- Book ID
- 115367691
- Publisher
- Optics InfoBase
- Year
- 2006
- Tongue
- English
- Weight
- 361 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1671-7694
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