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Effect of oxygen addition on microwave plasma CVD of diamond from CH4-H2 mixture

โœ Scribed by Chia-Fu Chen; Yen.C. Huang; Satoru Hosomi; Isao Yoshida

Book ID
113187858
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
543 KB
Volume
24
Category
Article
ISSN
0025-5408

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๐Ÿ“œ SIMILAR VOLUMES

Growth of diamond films from microwave p
Growth of diamond films from microwave plasma in CH4-CO2 mixtures
โœ G. Balestrino; M. Marinelli; E. Milani; A. Paoletti; P. Paroli; I. Pinter; A. Te ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 392 KB

We have studied the growth of diamond films from microwave plasma using gas mixtures of CH,-CO, (not previously reported in the literature) onto Si substrates. The diamond phase is obtained in the molar ratio .range 0.7 <CO,/ CH, G 1.38 -C 0.05, in close agreement with the empirical model of Bachman