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Effect of oxygen addition on boron incorporation on semiconductive diamond CVD

✍ Scribed by Sakaguchi, I; Nishitani-Gamo, M; Loh, K.P; Yamamoto, K; Haneda, H; Ando, T

Book ID: 121729258
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 154 KB
Volume: 7
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(98)00161-7

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