Effects of argon and oxygen addition to the CH4-H2 feed gas on diamond synthesis by microwave plasma enhanced chemical vapor deposition

✍ Scribed by Young-Soo Han; Yoon-Kee Kim; Jai-Young Lee

• Book ID: 108389195
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 556 KB
• Volume: 310
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(97)00339-8