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Effect of Ni interlayer on stress level of CoSi2 films in Co/Ni/Si(1 0 0) bi-layered system

✍ Scribed by K. Ma; J.Y. Feng

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 133 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.03.147

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