✦ LIBER ✦
Electrical properties of epitaxial NiSi2/Si contacts with extremely flat interface formed in Ni/Ti/Si(0 0 1) system
✍ Scribed by Osamu Nakatsuka; Atsushi Suzuki; Akira Sakai; Masaki Ogawa; Shigeaki Zaima
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 427 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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