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Effective formation of interface controlled Y2O3 thin film on Si(1 0 0) in a metal–(ferroelectric)–insulator–semiconductor structure

✍ Scribed by Kwang-Ho Kwon; Chang Ki Lee; Jun-Kyu Yang; Sun Gyu Choi; Ho Jung Chang; Hyeongtag Jeon; Hyung-Ho Park


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
203 KB
Volume
85
Category
Article
ISSN
0167-9317

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