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Effect of microstructures on the electrical and optoelectronic properties of nanocrystalline Ta–Si–N thin films by reactive magnetron cosputtering

✍ Scribed by C.K. Chung; T.S. Chen

Book ID
113896816
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
337 KB
Volume
57
Category
Article
ISSN
1359-6462

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