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Effect of ion current density on the phase composition of ion beam synthesized iron silicides in Si (100)

โœ Scribed by G.G. Gumarov; V.Yu. Petukhov; V.A. Shustov; I.B. Khaibullin


Book ID
114168817
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
268 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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