Comment on the dielectric breakdown properties, current density-voltage and capacitance-voltage characteristics of ion-beam-synthesized Si3N4 layers

✍ Scribed by R.D. Gould

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 426 KB
• Volume: 114
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(84)90131-7