The dielectric breakdown properties, current density-voltage and capacitance-voltage characteristics of ion-beam-synthesized Si3N4 layers

✍ Scribed by A.D. Yadav; M.C. Joshi

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 626 KB
• Volume: 102
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(83)90086-x