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Effect of in situ etching and substrate misorientation on the morphology of VPE InP layers

✍ Scribed by J. Chevrier; A.M. Huber; Nuyen T. Linh

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 355 KB
Volume: 54
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(81)90485-1

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