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Effects of NH3 on the growth rate and the surface morphology of GaAs in chloride VPE

✍ Scribed by Ryuji Kobayashi; Takuji Okahisa; Masaki Shiozaki; Fumio Hasegawa


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
842 KB
Volume
125
Category
Article
ISSN
0022-0248

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