A semi-empirical model for the complete orientation dependence of the growth rate for vapor phase epitaxy: chloride VPE of GaAs

✍ Scribed by L.K. Seidel-Salinas; S.H. Jones; J.M. Duva

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 940 KB
• Volume: 123
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(92)90619-t