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Effect of implanted phosphorus ions on the crystallization of amorphous silicon films under the action of pulsed excimer laser radiation

✍ Scribed by M. D. Efremov; V. A. Volodin; S. A. Arzhannikova; S. A. Kochubei; V. N. Ulasyuk


Book ID
110141361
Publisher
SP MAIK Nauka/Interperiodica
Year
2005
Tongue
English
Weight
55 KB
Volume
31
Category
Article
ISSN
1063-7850

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