Nanocrystalline silicon films formed under the impact of pulsed excimer laser radiation on polyimide substrates

✍ Scribed by M. D. Efremov; V. A. Volodin; L. I. Fedina; A. A. Gutakovskii; D. V. Marin; S. A. Kochubei; A. A. Popov; Yu. A. Minakov; V. N. Ulasyuk

• Book ID: 110135207
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2003
• Tongue: English
• Weight: 125 KB
• Volume: 29
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/1.1598552