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Effect of high hydrostatic pressure during annealing on silicon implanted with oxygen

✍ Scribed by A. Misiuk; A. Barcz; J. Ratajczak; L. Bryja

Book ID: 110442252
Publisher: Springer US
Year: 2003
Tongue: English
Weight: 366 KB
Volume: 14
Category: Article
ISSN: 0957-4522
DOI: 10.1023/a:1023911609195

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