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Effect of gas Pressure on the Mechanical Properties of Sputtered TaN Films

✍ Scribed by Liu, Erbao; Jin, Guo; Cui, Xiufang; Xiao, Qiang; Shao, Tianmin


Book ID
121490806
Publisher
Elsevier
Year
2013
Tongue
English
Weight
840 KB
Volume
50
Category
Article
ISSN
1875-3892

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