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Effect of carbon on thermal oxidation of silicon and electrical properties of SiO2-Si structures

✍ Scribed by R. B. Beck; T. Brozek; J. Ruzyllo; S. D. Hossain; R. E. Tressler

Book ID
112820129
Publisher
Springer US
Year
1993
Tongue
English
Weight
753 KB
Volume
22
Category
Article
ISSN
0361-5235

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