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Effect of fast annealing on the electrical properties of SiO2/Si structures with thin layers of anodic silicon oxide

✍ Scribed by I. L. Baranov; L. V. Tabulina; L. S. Stanovaya; T. G. Rusalskaya


Book ID
111443588
Publisher
Springer
Year
2006
Tongue
English
Weight
167 KB
Volume
40
Category
Article
ISSN
1063-7826

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